Special vacuum mounting technology without roller (Roller mounting Optional)
Configure with multi link wafer transfer robot
Bernoulli arm for thinner wafer handling
Wafer position & warpage intelligent mapping
Fiber sensor for wafer alignment
Contact chuck to handle various wafer
Wafer cassette loading (Wafer Box Optional)
Industrial PC control with 17’touch panel LCD
Built-in Ionizers for ESD protection
This website uses cookies to improve your experience of visiting this website, but if you do not agree, you may choose to cancel.
For more information, see our
Privacy Policy。
